Asteran Inc. Russian manufacturer hexachlorodisilane (HCDS) since 1992.

Worldwide distributor of bulk HCDS (minimum order is 100 kg). 

Hexachlorodisilane (HCDS) is a chemical compound widely used is semiconductor industry for production of semiconductors, fiber optics and solar energy products. Asteran is one of the leading providers and worldwide distributor of hexachlorodisilane located in Moscow, Russia. We manufacture low and high purity hexachlorodisilale (HCDS) for over 20 years.

Production of semiconductors and solar cells typically is developed through atomic layer deposition (ALD) or chemical vapor deposition (CVD) processes to produce thin layer films of silicon dioxide. Asteran Inc develops carbon-free silicon precursors for use in FCVD (Flowable Chemical Vapor Deposition) reactors. Increasingly small structural sizes (< 25 nanometers) for flash memory is driving demand among the manufacturers.

Links: Hexachlorodisilane (HCDS) technical information page [link], high purify HCDS fo[link], Standard and current lot of HCDS production [link PDF] (updated August 29, 2016), Applications [link]

Chemical: Hexachlorodisilane, HCDS

Formula: Cl3Si-SiCl3 (Si2Cl6)

CAS: 13465-77-5


hexachlorodisilane HCDS

Two primary production methods:

o Low purity method (95-98%): The usual synthetic route to HCDS involves the reaction of chlorine on silicon alloys, but can result in low levels of metallic contamination from the silicon alloys such as titanium.

Application is as a precursor to substituted disilanes and can be recovery in low quantities as one byproduct of a trichlorosilane (TCS) production reaction.

Applications within the chemical and coating sector requiring lower-purity HCDS as a precursor for substituted disilanes for silicon-based coatings.

o High purity method (>99%): Titanium-catalyzed semiconductor grade silane disproportionation process

High purity chemicals and repetative purification processes used in the production of ultra-pure hexachlorodidilane for semiconductor integrated circuits and solar cells.


Please note that minimum order of HCDS from Asteran is 100 kg.

For pricing quote please contact us at

Contact: Asteran Inc, 1200 Dzerzhinsk Ave, Moscow, Russia,, Web: